Connecting heat transfer macromodels for array MEMS structures
نویسندگان
چکیده
Different methodologies to extract a dynamic compact thermal model of a microelectronic or MEMS device have been developed in recent years. They include strategies based on data fitting, a time-constant spectrum, modal analysis and finally formal model reduction. Researchers seek compact thermal multiport representation for system level simulation. However, thermal flux is not lumped by nature as electrical flow and, as a matter of fact, there appears to be very few works on how to couple dynamic compact thermal models with each other. In the present work, we take a finite element model of a MOS-transistor-based microhotplate array made in ANSYS as a case study. We consider two available techniques to make the model reduction. First, we employ the block Arnoldi algorithm that makes model reduction of the whole array at once. Second, we use the modified Guyan algorithm for a single hotplate and couple reduced models via substructuring. We compare both techniques with each other and discuss the possibility of combining the best parts of the two approaches. (Some figures in this article are in colour only in the electronic version)
منابع مشابه
Error Indicators for Fully Automatic Extraction of Heat-Transfer Macromodels for MEMS
In this paper, we present three heuristic error indicators for the iterative model order reduction of electro-thermal MEMS models via the Arnoldi algorithm. Such error indicators help a designer to choose an optimal order of the reduced model, required to achieve a desired accuracy, and hence allow a completely automatic extraction of heattransfer macromodels for MEMS. We first suggest a conver...
متن کامل8 Macromodels of Micro - Electro - Mechanical Systems ( М EMS )
Micro-electro-mechanical Systems (MEMS) are components with micron-scale moving parts based on materials and processes of microelectronics fabrication. This is a good example of on-chip integration of electronics, microstructures, microsensors and microactuators. Accurate simulation of MEMS requires precise modeling of all effects of mechanical and damping forces, electrostatic forces and inner...
متن کامل8 Macromodels of Micro - Electro - Mechanical Systems ( М EMS ) Anatoly Petrenko
Micro-electro-mechanical Systems (MEMS) are components with micron-scale moving parts based on materials and processes of microelectronics fabrication. This is a good example of on-chip integration of electronics, microstructures, microsensors and microactuators. Accurate simulation of MEMS requires precise modeling of all effects of mechanical and damping forces, electrostatic forces and inner...
متن کاملNumerical simulation of laminar convection heat transfer from an array of circular perforated fins
The present paper reports the laminar fluid flow and heat transfer of a heated array of circular-perforated and solid fins mounted over a flat surface using the finite-volume method. One to four circular cross-sectional perforations are made along the length of the fins. The SIMPLE algorithm is used for pressure-velocity coupling and the second order upwind technique is employed to discreti...
متن کامل